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타원 편광법의 원리와 응용

Principles and Applications of Ellipsometry

실험 내용 Principle of ellipsometry,ellipsometry by extinction,Optical alignment,Polarization of light,Determination of fast and slow axes of a waveplate,
Ellipsometric angle determination of material,Measurements of: index of a silicon substrate(n and k),
Measurements in function of the incidence angle and in function of wavelength(refractive index dispersion),
Highlighting the influence of a measurement error on the values of n, k and e(based on software calculation).
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실험 목적 To use an ellipsometer in order to determine the refractive index and the thickness of various samples (silicon substrate, SiO2 monox-x-x-layer on silicon substrate, aluminum, glass).
A study on the effects of changes in wavelength and angle of incidence is conducted. An approach to measurement errors and their origin is also discussed.
 
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