MProbe 20 series
Thin Film Measurement
측정 방식 | 비 접촉식 측정 |
---|---|
측정 범위 | 1nm ~ 1000µm |
정밀도 | 0.1Å or 0.01% (greater of) |
빔 크기 | 2mm standard (optional to 20µm) |
응용 분야 | SiO2, SiNx, DLC, Photoresist, Polymer, Polyamide, polySi, nanocrystalline Si, aSi, Si, Parylene, industrial coatings. |
Thin-film solar cells: aSi, CIGS, CdT, TCO, Semiconductor and dielectric materials (Photoresist, oxides, nitrides, OLED stack) | |
Optical coatings (Anti-Reflection, Hard coatings, Filters),Liquid Crystal displays (Cell Gaps, ITO, Polyamides) | |
Magnetic media, laser mirrors, thin metal films | |
첨부1 | 카다로그 |
The system is user friendly and easy to setup – you will be ready to start measurements right away. Everything is included for
samples measurement: spectrometer/ light source (main unit), fiber optics probe, sample stage, software,
calibration/reference sample.
Our extensive materials library has 500+ materials. New materials can be easily imported or created/added to the library.
Support for a wide range of parameterized materials (from Cauchy to Tauc-Lorentz, etc.) is included.
One-click measurement combines data acquisition and data analysis. Everybody is a measurement expert with MProbe!
For advanced users, we have all the sophisticated tools including sensitivity analysis, error-estimator, simulation, filmstack
switching, global optimization, x-x-x-x-x-x-x-x-x-layers and materials linking, etc. that can be used for advanced applications development
Reflectance and transmittance spectral data can also be used as a raw measurement (for example, as in spectrophotometer) or
a for a wide range of other applications e.g. chemical concentration (we have a range of flow cells), filters and coating testing,
etc.
System model can be selected based on the required thickness and/or wavelength range.Custom configurations that combine
features of different models are available on request. Please let us know your application and we will offer a solution
What’s in the box?
- Main unit (includes spectrometer(s), light source, electronics)
- Reflectance probe
- Sample table with reflectance probe holder
- TFCompanion -R software Advanced version (USB dongle (license key),
Software, user guide and other materials on USB memory stick )
- Calibration set: reference wafer (Si or Al depending on the model, or/and Quartz plate (optional)) and black absorber/pad
- Test sample- 200nm oxide wafer
- USB cable (connecting main unit to computer)
- Universal power adapter (110V/220V)
In addition, MProbe includes the following Semiconsoft advantages:
Library with over 500 materials and support for parameterized materials
12 months of free software updates and application support
Hardware upgrade program
Why use MProbe
Flexible: select the best hardware configuration for your application
Affordable: up to 50% savings as compared to other commercial instruments
Precision: unmatched precision <0.01nm or 0.01%
Materials database: extended database (500+ materials) is included
Software: flexible, user friendly and powerful software; integrated control/data acquisition and data
analysis; any filmstack: no limits on number of x-x-x-x-x-x-x-x-x-layers, support inhomogeneous and thick incoherent x-
x-x-x-x-x-x-x-x-layers, surface roughness, multi-sample analysis, etc.
Integration: several integration options are available: Modbus TCP, OPC (DA 2.0/3.0), custom options
Technical support: application and technical support
Applications
Practically any translucent or low-absorbing film can be measured: SiO2, SiNx, DLC, Photoresist,
Polymer, Polyamide, polySi, nanocrystalline Si, aSi, Si, Parylene, industrial coatings.
1nm-1000µm thickness range
Thin-film solar cells: aSi, CIGS, CdT, TCO
Semiconductor and dielectric materials (Photoresist, oxides, nitrides, OLED stack)
Optical coatings (Anti-Reflection, Hard coatings, Filters)
Liquid Crystal displays (Cell Gaps, ITO, Polyamides)
Magnetic media, laser mirrors, thin metal films