Real-time broadband optical thickness monitor. Special model – MProbe UVVisF – for

measurement in high ambient light environment e.g. sputtering or other plasma assisted deposition techniques. Use of high-intensity flush Xe lamp with gated data acquisition, allows

accurate measurement in most challenging environment.

Flexible integration: reflectance probe can be placed outside the deposition chamber optical

port or inside, using a fiberoptics feedthru. Light can be focused on the sample surface or collimated.

Fast – no moving parts: typical measurement ~ 20ms

Any translucent films can be measured quickly and reliably.

Extensive materials library: (500+ materials- new materials easily added). Support of

parameterized materials: Cacuhy, Tauc-Lorentz, Cody-orentz, EMA and many more….

Easy integration with deposition control: OPC (DA2.0/3.0) and ModbusTCP interface.

Hardware triggers (5V TTL) or programmable RS232 command.

Measured parameters: thickness, optical constants, surface roughness.

Chamber integration: Optical adapter (reduced kinematic mount) integrates smoothly with optical port flange, feed-thru adapter option for low/room temperature chambers

Integration with chamber control system (SCADA): build-in Modbus and OPC servers(optional)

Applications

Any translucent films can be measured quickly and reli­ably: Optical coatings, Oxides,Nitrides,

Photoresists, Poly­mers, Semiconductors (Si, aSi, polySi), Compound Semi­conductors (AlGaAs,

InGaAs, CdTe,CIGS),Hard coatings (SiC, DLC), metal oxides, thin metal films and many more.