분석장비

20.jpg
20.jpg
21.jpg
19.png
22.jpg

MProbe 40 series

Thin Film Measurement

측정 방식 비 접촉식 측정
측정 범위 1nm ~ 1000µm
정 밀 도 0.1Å or 0.01% (greater of)
빔 크 기 < 4 µm
응용 분야 Patterned wafers, MEMS, other samples that require small measurement spot.
Practically any translucent or low-absorbing film can be measured: SiO2, SiNx, DLC, Photoresist, Polymer, Polyamide, polySi, nanocrystalline Si, aSi, Si, Parylene, industrial coatings.
Thin-film solar cells: aSi, CIGS, CdT, TCO
Semiconductor and dielectric materials (Photoresist, oxides, nitrides, OLED stack)
Optical coatings (Anti-Reflection, Hard coatings, Filters)
Liquid Crystal displays (Cell Gaps, ITO, Polyamides),Magnetic media, laser mirrors, thin metal films
 
첨부1 카다로그  


The MProbe 40 is a complete thin-film measurement system. Select the model and options the fit best for your application requirements or let us know your application and we will help to select…

You’ll be ready to start measurements -everything is included.

Our extensive materials library has 500+ materials, with easy import/creation of the new materials and support for a wide range of parametrized materials (from Cauchy to Tauc-Lorentz) is included.

One-click measurement combines data acquisition (reflection or transmittance spectrum) and data analysis. Everybody is a measurement expert with MProbe!

Of course, we have all the sophisticated tools including sensitivity analysis, error-estimator, simulation, filmstack switching, global optimization, x-x-x-x-x-x-x-x-x-layers and materials linking, etc. for complicated applications development

Reflectance and transmittance spectral data can also be used as a raw measurement (for example, as in spectrophotometer) or a for a wide range of other applications.

 

What’s in the box?

·   Main unit: includes spectrometer(s), light source (UV models) , electronics (50W halogen light source is included in

     microscope illuminator)

·   Fiberoptic probe

·   Upright inspection microscope with four long WD objectives-95 mm parfocal length (UV and NIR models have three

  visible and one UVVisNIR achromatic 8x objective)

·   TFCompanion -R software Advanced version (USB dongle (license key), Software, user guide and other materials on USB

  memory stick )

·   Calibration sample (Si or Al depending on the model) and black absorber pad

·   Test sample- 200nm oxide wafer

·   USB cable (connecting main unit to computer)

·   Universal power adapter (110V/220V)


   In addition, MProbe includes the following Semiconsoft advantages:

·   Library with over 500 materials and support for parameterized materials

·   12 months of free software updates and application support

    ·   Hardware upgrade program


Why use MProbe 40

Micro spot: measure with spot size < 4 µm
Flexible: select the best hardware configuration for your application. MProbe model and options. Already

      have microscope? We can help to integrate…

Affordable: up to 50% savings as compared to other commercial instruments

Precision: unmatched precision <0.01nm or 0.01%

Materials database: extended database (500+ materials) is included

Software: flexible, user friendly and powerful software; integrated control/data acquisition and data

analysis; any filmstack: no limits on number of x-x-x-x-x-layers, support inhomogeneous and thick

incoherent x-x-x-x-x-layers, surface roughness, multi-sample analysis, etc.

 Technical support: application and technical support

 

Applications

Patterned wafers, MEMS, other samples that require small measurement spot,


Practically any translucent or low-absorbing film can be measured: SiO2, SiNx, DLC, Photoresist, Polymer,

Polyamide, polySi, nanocrystalline Si, aSi, Si, Parylene, industrial coatings.


1nm-1000µm thickness range


Thin-film solar cells: aSi, CIGS, CdT, TCO

Semiconductor and dielectric materials (Photoresist, oxides, nitrides, OLED stack)

Optical coatings (Anti-Reflection, Hard coatings, Filters)

Liquid Crystal displays (Cell Gaps, ITO, Polyamides)

Magnetic media, laser mirrors, thin metal films

 

Microscope objectives

Microscope RET attachment

 

APO Objective